Start-up unveils prototype ‘heart’ of EUV lithography amid China chipmaking push

A Chinese start-up has unveiled a prototype extreme ultraviolet (EUV) light-source machine – a component often described as the “heart” of advanced lithography systems – marking an early but critical step in Beijing’s drive for self-reliance in chipmaking equipment. At the China International Industry Fair in Shanghai, Langdao Silex displayed its self-developed EUV light-source system. Ninety per cent of the machine’s components were localised, with the vast majority of core parts developed...